Since 1987, micro-electro-mechanical-systems (MEMS) has advanced from the early stage of technology development, device exploration, and laboratory research, to the mature stage of quantity production, practical applications, and expanding to many new areas of exploration and research. Such devices are fabricated using a wide range of technologies, having in common the ability to create structures with micro- and even nanometer accuracies. The products range in size from a few micrometers to millimeters. These devices have the ability to sense, control and actuate on the micro scale, and generate effects on the macro scale. Demands for microelectromechanical systems (MEMS) are continuously growing and it is predicted that they will continue to grow for, at least, a few more decades.
Recent advances of sensor technologies have been powered by high-speed and low-cost electronic circuits, novel signal processing methods, and advanced manufacturing technologies. The synergetic interaction of new developments in these fields provides promising technical solutions increasing the quality, reliability, and economic efficiency of technical products.
This book ‘Sensors, Actuators, and their Interfaces’ brings together interdisciplinary information dedicated to research and development in the field of sensors, actuators and micro-systems. It includes research papers, reviews on complete sensor and actuator networks dealing with operating systems and network hardware for sensor and actuator networks, principles and applications of sensors and actuators, crossing multiple disciplines including aerospace, biomedical, chemical, civil, electrical, and mechanical engineering.
This book will serve as valuable guide to the students, practitioners, researchers and the planners of MEMS development to stimulate more valuable discussions and studies.